INDUCT FTIR GAS ANALYSIS SYSTEM SPEC SHEET: http:// /docs/UR/inductds.pdf Torr to mTorr sensitivity for many gas species including VOC's, PFC's, acids, bases and hydrides Analysis of more than 30 gases Permanent calibration spectra reduce the need for costly gas cylinders Easy to install - Easily fitted with custom flanges, valves and vacuum components Semiconductor and advanced thin film process monitoring, development, optimization and control - deposition processes, including CVD, ALD & PVD - Etch Processes, including endpoint - lithography processes Scrubber and abatement monitoring Stack emissions monitoring (environmental compliance) It includes everything, as pictured. There may be other items included, but if you don't see it pictured, don't expect to receive it. (We do not proofread any ads submitted by members) |
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