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ASML SVG 90-S I-Line Coater/Developer Track 200mm wafers This system may not have the operating system. 4 serial arms and 1 90SE serial arm Local exhausted cabinet locations Floor is solid SS spill containment with overflow sensors Control Module on CES (left or right-integrated) Rear-pull interface for Nikon B11/12 stepper Coater/Developer direct floor drain (Tee in cabinet) Full/clogged drain sensor on each coater Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead Facility sensors for vacuum generators, DI water and caustic exhaust Photoresistant Temperature control Dispense line ID (nozzle tip=3/16") 1 SS non-coated 3 gallon un-pressurized vessel with Kalrez o-rings and 4 liquid level sensors 0.1µm solvent filter per canister TEBR, BEBR, SVB-25cc Millipore unfiltered pump (subject to availability) Solvent filter between bulk fill valve and Canister Air Temperature/Humidity Controller High flow(2 stream) nozzle on center 1 SS Tefzel-coated 3 gallon pressurized canister with Kalrez o-rings and 4 liquid level sensors Vacuum Bake Ovens, stacked-quantity 6 Vapor Prime Ovens, stacked-quantity 2 Quick disconnects HMDS canister (no exposure) Air Venturi, 2 modules/Venturi SS, non-coated, 2 gallon, Kalrez o-rings, 2 level sensors, DOT canisters in chemical cabinets SEMICONDUCTOR EQUIPMENT SPARES Monday - Friday 8:30 AM - 5:00 PM Mountain Standard Time Closed Saturday, Sunday and all major US holidays. SEMICONDUCTOR EQUIPMENT SPARES (We do not proofread any ads submitted by members) |
J_bryant@desmoines-classifieds.com (Jennie Bryant) for more information. Your emails will be instantly forwarded to the poster's private address.
