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Hitachi Metal Etch System M-308ATE 200mm Wafer * Software Version 74.9 for B16/B32 or later * Ergonomic Load/Unload Cassettes * 2.45Ghz Magnetron for Gas Ionization * Helium Backside Wafer Cooling * Solenoid Coils for Magnetic Field 875G Plasma Densification * STEC-4000 Mass Flow Controllers * Microwave DC Power Generator for Etch YCC-18Kx * RF Power Generator RP-300-2Mx-C * Shimadzu TMP-2001LME Turbo Molecular Pump for Etch Chamber * Heated Capacitance Monometer for Etch MKS 390HA * MKS 270C/113A Digital Display * MKS 122A Capacitance Monometer for Helium Backside * Fiber Optic/Photomultiplier Tube End Point System set at 396nm * Electrode Chiller CH400-AHS-MO * Shimadzu TMP280L Turbo Molecular Pump for Buffer Room Ash Chamber * Microwave DC Power Generator IDX AL-Type * Yamatake Honeywell SDC-20 Temp Controller * End Point System Filter set at 451nm SEMICONDUCTOR EQUIPMENT SPARES Monday – Friday: 8:30 AM - 5:00 PM Mountain Standard Time (MST) Closed Saturday, Sunday and all major US holidays. SEMICONDUCTOR EQUIPMENT SPARES (We do not proofread any ads submitted by members) |
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