Hitachi M-511E Wafer Interface Transfer Robot 200mm with linear track This Hitachi wafer interface robot is used, operable surplus. It was removed from a larger system. The physical condition is very good and it looks almost new. There is no model tag on or in the robot. The robot linear track is also included. It comes with a Rorze step driver, two Super Vexta drivers, and interface cables. * Model No: Hitachi M-511E robot * THK KR55 linear track, 45" overall length * Rorze 2P Micro Step Driver, RD-023MS * Super Vexta 5-Phase Driver, UDX5107N SEMICONDUCTOR EQUIPMENT SPARES Monday – Friday: 8:30 AM - 5:00 PM Mountain Standard Time (MST) Closed Saturday, Sunday and all major US holidays. SEMICONDUCTOR EQUIPMENT SPARES (We do not proofread any ads submitted by members) |
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