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Tokyo Electron EPD210S End-Point Detector with EPDF-B Fiber Optic Sensor Comes with what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from a 3rd party and may vary slightly due to upgrades, options, or revisions this unit may or may not have. The Main Unit's Serial Number Tag Reads: The Fiber Optic's Serial Number Tag Reads: Part Number: 028104-11/0082-13 Wavelength Information from the Unit: X(mm) = WL(nm)/40.0019-0.0087 Description (from a patent website): Document: United States Patent 6088096 Abstract: An end-point detector for a plasma etcher, includes a converging lens for receiving strip-like plasma light produced between a pair of opposed electrodes and a spectroscope, having a slit located at a substantial rear-side focal plane of the converging lens, for detecting an etching end time point from a time-based variation of spectrum light intensity of the plasma light which has been converged at the slit and has passed through the slit. The converging lens has a pupil diameter of not greater than ##EQU1## where W is a width of a short side of the strip-like plasma light produced between the electrodes, 1 is a distance between an end of each electrode and a pupil face of the converging lens, NAm is a numerical aperture required by the spectroscope, and h is a width of a short side of the slit of the spectroscope. The converging lens has a numerical aperture of not less than NAm. For More Pictures Please Click the Following: * Picture 4 - Fiber Optic Input #1 * Picture 5 - Fiber Optic Input #2 * Picture 6 - Wavelength Control * Picture 7 - Fiber Optics #1 * Picture 8 - Fiber Optics #2 * Picture 9 - Fiber Optic Sensor Close-Up * Picture 10 - Fiber Optic Serial Number Tag * Picture 11 - Controller Serial Number Tag * Picture 12 - Fiber Optic Part Number Tag * Picture 13 - Controller Part Number Tag (We do not proofread any ads submitted by members) |
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